Precision-structural Design for Scanning Probe Microscopes

Varieties of imaging with scanning probe microscopes.

T question comes up periodically at conference lunches where scanning probe microscopists are gathered: ‘‘Do you think we could image biological macromolecules under a thin layer of water?’’ It would be wonderful if we could confine biological macromolecules under a thin layer of water or other aqueous solution such that the biomolecules were all close enough to the surface for the atomic force...

MEMS-based fast scanning probe microscopes.

Scanning probe microscopy is a frequently used nanometer-scale surface investigation technique. Unfortunately, its applicability is limited by the relatively low image acquisition speed, typically seconds to minutes per image. Higher imaging speeds are desirable for rapid inspection of samples and for the study of a range of dynamic surface processes, such as catalysis and crystal growth. We ha...

Methods for vertical drift measurements of scanning probe microscopes.

Time stability plays an important role in the applications of scanning probe microscopes (SPMs). Although SPMs integrated with a closed-loop control system could reduce the drift greatly, drift would still exist. The SPM drift in the lateral direction has been well studied, and several measurement methods have also been developed. However, due to coupling of the lateral drift, it is still diffi...

The Evolution of Scanning Probe Microscopes for Biological Imaging

Mass-Producible Monolithic Silicon Probes for Scanning Probe Microscopes

SUMMARY In this paper, we describe the design, fabrication, and testing of monolithically micromachined silicon probes for scanning probe microscope (SPM) applications. An SPM probe consists of three parts: an atomically sharp tip, a supporting flexural beam, and a handle. Unique design and fabrication processes allow probes with uniform geometry be developed efficiently. The process is robust ...